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Material family — fused quartz
Quartzware for diffusion, thin film and wet process.
Quartz is where most chamber kits start and where most of them fail. We fabricate it from authorised GE stock and from Saint-Gobain, Heraeus and Tosoh material — machine finished or flame polished, to your drawing or copied exactly from the part in your hand.
What we fabricate
Forms we make regularly.
This is not a catalogue — almost everything is made to a customer drawing. It is a list of the shapes our fixturing and our people already know well, which is usually where the shortest lead times are.
| Form | Typical process area | Notes |
|---|---|---|
| Tubes | Vertical and horizontal diffusion | Process tubes and liners for thermal furnaces, to drawing. |
| Liners | Etch, CVD, diffusion | Chamber and tube liners, machine finish or flame polished. |
| Windows | Etch, metrology, optical | Viewports and transmission windows; polished finishes. |
| Rings | Single-wafer chambers | Focus, edge and support rings in fused quartz. |
| Injectors | Thin film, diffusion | Gas injection assemblies and distribution tubes. |
| Pedestals | Single-wafer processing | Wafer support and lift hardware. |
| Tanks & cleaning basins | Wet clean, chemical processing | Welded and fabricated vessels for wet benches. |
| Insulators | Thermal, RF | Electrical and thermal isolation components. |
| Covers | General chamber hardware | Lids, shields and enclosure parts. |
| Boats & carriers | Diffusion, wafer transport | Wafer handling and transport quartzware. |
Working from a sample rather than a drawing? That is normal in this business. Send the part; we dimension it, produce a drawing you own, and quote from that. Start an RFQ →
Where it goes
From thin film and diffusion through to wafer transport and cleaning.
Our quartzware runs in vertical and horizontal diffusion furnaces, single-wafer process chambers, wet benches and wafer handling systems. Outside the fab, the same fabrication capability serves optical applications, industrial chemical processing and high-temperature furnace builders.
Finish is specified per application: a machine finish where the surface is structural, a flame polish where it is optical or where particle performance and cleanability matter most.
Material
Grade selection is a contamination decision.
The right grade depends on what your process will not tolerate. We are one of the largest authorised fabricators of GE quartz and hold the grades below; where a customer specification calls for it we fabricate Saint-Gobain, Heraeus and Tosoh material instead.
| Grade | Character | Selected when |
|---|---|---|
| 114 | Clear fused, general purpose | Standard structural and process quartzware. |
| 124 | Clear fused, general purpose | Standard quartzware where optical clarity matters. |
| 214 | Low alkali | Alkali migration into the process is the limiting factor. |
| 224 | Low alkali | As 214, where the form or size calls for this stock. |
| 244 | Low aluminium | Tightest contamination budgets in diffusion and thermal. |
| Opaque | Opaque fused quartz | Thermal shielding and diffuse radiation control. |
Certificates of conformance and material traceability accompany every shipment. See Quality for the documentation package, or Materials for the full reference.
How a quartz job runs
Four stages, and you can enter at any of them.
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Material selection
We work through grade, finish and form against your process conditions and contamination budget — before anything is quoted.
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Prototype or copy exact
Small-quantity builds to prove the design, or dimensional replication of an existing part where the goal is an identical replacement.
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Qualification
First-article inspection against the drawing, with the measurement records that your incoming inspection will ask for.
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Volume production
Repeat builds under Copy Exact™ discipline, so the part you qualified is the part you keep receiving.
Next step
Quote a quartz part.
Send a drawing, a part number, or photographs and dimensions of the part you are replacing.